Growth of multioxide planar film with the nanoscale inner structure via anodizing Al/Ta layers on Si

Published 2008 View Full Article

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Title
Growth of multioxide planar film with the nanoscale inner structure via anodizing Al/Ta layers on Si
Authors
Keywords
-
Journal
ELECTROCHIMICA ACTA
Volume 54, Issue 3, Pages 935-945
Publisher
Elsevier BV
Online
2008-08-28
DOI
10.1016/j.electacta.2008.08.030

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