Growth of multioxide planar film with the nanoscale inner structure via anodizing Al/Ta layers on Si

标题
Growth of multioxide planar film with the nanoscale inner structure via anodizing Al/Ta layers on Si
作者
关键词
-
出版物
ELECTROCHIMICA ACTA
Volume 54, Issue 3, Pages 935-945
出版商
Elsevier BV
发表日期
2008-08-28
DOI
10.1016/j.electacta.2008.08.030

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