Codiffusion of Phosphorus and Carbon in Preamorphized Ultrashallow Junctions

Title
Codiffusion of Phosphorus and Carbon in Preamorphized Ultrashallow Junctions
Authors
Keywords
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Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 15, Issue 6, Pages H202
Publisher
The Electrochemical Society
Online
2012-04-21
DOI
10.1149/2.017206esl

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