Codiffusion of Phosphorus and Carbon in Preamorphized Ultrashallow Junctions

标题
Codiffusion of Phosphorus and Carbon in Preamorphized Ultrashallow Junctions
作者
关键词
-
出版物
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 15, Issue 6, Pages H202
出版商
The Electrochemical Society
发表日期
2012-04-21
DOI
10.1149/2.017206esl

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