Properties and tool performance of ta-C films deposited by double-bend filtered cathodic vacuum arc for micro drilling applications

Published 2010 View Full Article

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Title
Properties and tool performance of ta-C films deposited by double-bend filtered cathodic vacuum arc for micro drilling applications
Authors
Keywords
-
Journal
DIAMOND AND RELATED MATERIALS
Volume 19, Issue 7-9, Pages 866-869
Publisher
Elsevier BV
Online
2010-02-13
DOI
10.1016/j.diamond.2010.02.002

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