Properties and tool performance of ta-C films deposited by double-bend filtered cathodic vacuum arc for micro drilling applications

出版年份 2010 全文链接

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作者

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出版物

DIAMOND AND RELATED MATERIALS

Volume 19, Issue 7-9, Pages 866-869

出版商

Elsevier BV

发表日期

2010-02-13

DOI

10.1016/j.diamond.2010.02.002

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DIAMOND AND RELATED MATERIALS

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