Improving purity and size of single-crystal diamond plates produced by high-rate CVD growth and lift-off process using ion implantation

Published 2009 View Full Article

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Title
Improving purity and size of single-crystal diamond plates produced by high-rate CVD growth and lift-off process using ion implantation
Authors
Keywords
-
Journal
DIAMOND AND RELATED MATERIALS
Volume 18, Issue 10, Pages 1258-1261
Publisher
Elsevier BV
Online
2009-05-05
DOI
10.1016/j.diamond.2009.04.005

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