Improving purity and size of single-crystal diamond plates produced by high-rate CVD growth and lift-off process using ion implantation

标题
Improving purity and size of single-crystal diamond plates produced by high-rate CVD growth and lift-off process using ion implantation
作者
关键词
-
出版物
DIAMOND AND RELATED MATERIALS
Volume 18, Issue 10, Pages 1258-1261
出版商
Elsevier BV
发表日期
2009-05-05
DOI
10.1016/j.diamond.2009.04.005

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