Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography

Published 2007 View Full Article

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Title
Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography
Authors
Keywords
-
Journal
DIAMOND AND RELATED MATERIALS
Volume 17, Issue 4-5, Pages 804-808
Publisher
Elsevier BV
Online
2007-10-26
DOI
10.1016/j.diamond.2007.10.015

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