Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography

标题
Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography
作者
关键词
-
出版物
DIAMOND AND RELATED MATERIALS
Volume 17, Issue 4-5, Pages 804-808
出版商
Elsevier BV
发表日期
2007-10-26
DOI
10.1016/j.diamond.2007.10.015

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