Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma

标题
Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma
作者
关键词
-
出版物
DIAMOND AND RELATED MATERIALS
Volume 17, Issue 7-10, Pages 1292-1296
出版商
Elsevier BV
发表日期
2008-01-17
DOI
10.1016/j.diamond.2008.01.011

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