Area-Selective Atomic Layer Deposition: Conformal Coating, Subnanometer Thickness Control, and Smart Positioning

Published 2015 View Full Article

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Title
Area-Selective Atomic Layer Deposition: Conformal Coating, Subnanometer Thickness Control, and Smart Positioning
Authors
Keywords
-
Journal
ACS Nano
Volume 9, Issue 9, Pages 8651-8654
Publisher
American Chemical Society (ACS)
Online
2015-09-09
DOI
10.1021/acsnano.5b05249

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