Area-Selective Atomic Layer Deposition: Conformal Coating, Subnanometer Thickness Control, and Smart Positioning

标题
Area-Selective Atomic Layer Deposition: Conformal Coating, Subnanometer Thickness Control, and Smart Positioning
作者
关键词
-
出版物
ACS Nano
Volume 9, Issue 9, Pages 8651-8654
出版商
American Chemical Society (ACS)
发表日期
2015-09-09
DOI
10.1021/acsnano.5b05249

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