Aerosol-assisted delivery of precursors for chemical vapour deposition: expanding the scope of CVD for materials fabrication
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Title
Aerosol-assisted delivery of precursors for chemical vapour deposition: expanding the scope of CVD for materials fabrication
Authors
Keywords
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Journal
DALTON TRANSACTIONS
Volume 42, Issue 26, Pages 9406
Publisher
Royal Society of Chemistry (RSC)
Online
2013-04-15
DOI
10.1039/c3dt50607j
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