Aerosol-assisted delivery of precursors for chemical vapour deposition: expanding the scope of CVD for materials fabrication
出版年份 2013 全文链接
标题
Aerosol-assisted delivery of precursors for chemical vapour deposition: expanding the scope of CVD for materials fabrication
作者
关键词
-
出版物
DALTON TRANSACTIONS
Volume 42, Issue 26, Pages 9406
出版商
Royal Society of Chemistry (RSC)
发表日期
2013-04-15
DOI
10.1039/c3dt50607j
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