Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors

Atomic Layer Deposition of Gd2O3 and Dy2O3: A Study of the ALD Characteristics and Structural and Electrical Properties

(2012) Ke Xu et al.   CHEMISTRY OF MATERIALS

Yttrium–scandium oxide as high-kgate dielectric for germanium metal–oxide–semiconductor devices

(2010) M K Bera et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Lanthanide amidinates and guanidinates: from laboratory curiosities to efficient homogeneous catalysts and precursors for rare-earth oxide thin films

(2009) Frank T. Edelmann   CHEMICAL SOCIETY REVIEWS

Lanthanide Oxide Thin Films by Metalorganic Chemical Vapor Deposition Employing Volatile Guanidinate Precursors

(2009) Andrian P. Milanov et al.   CHEMISTRY OF MATERIALS

Growth of Crystalline Gd2O3Thin Films with a High-Quality Interface on Si(100) by Low-Temperature H2O-Assisted Atomic Layer Deposition

(2009) Andrian P. Milanov et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

SmScO3 thin films as an alternative gate dielectric

(2008) E. Durğun Özben et al.   APPLIED PHYSICS LETTERS

Synthesis, Characterization, and Thermal Properties of Homoleptic Rare-Earth Guanidinates: Promising Precursors for MOCVD and ALD of Rare-Earth Oxide Thin Films

(2008) Andrian P. Milanov et al.   INORGANIC CHEMISTRY

Electrical characteristics of MOSFETs with La2O3/Y2O3 gate stack

(2008) Parhat Ahmet et al.   MICROELECTRONICS RELIABILITY

Introducing crystalline rare-earth oxides into Si technologies

(2008) H. J. Osten et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Structural and Optical Properties of Nanocrystalline Er[sub 2]O[sub 3] Thin Films Deposited by a Versatile Low-Pressure MOCVD Approach

(2007) Maria Losurdo et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY