Atomic Layer Deposition of Gd2O3 and Dy2O3: A Study of the ALD Characteristics and Structural and Electrical Properties

Published 2012 View Full Article

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Title
Atomic Layer Deposition of Gd2O3 and Dy2O3: A Study of the ALD Characteristics and Structural and Electrical Properties
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 24, Issue 4, Pages 651-658
Publisher
American Chemical Society (ACS)
Online
2012-02-11
DOI
10.1021/cm2020862

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