SiOx interlayer to enhance the performance of InGaZnO-TFT with AlOx gate insulator

Published 2012 View Full Article

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Title
SiOx interlayer to enhance the performance of InGaZnO-TFT with AlOx gate insulator
Authors
Keywords
-
Journal
CURRENT APPLIED PHYSICS
Volume 12, Issue 5, Pages 1288-1291
Publisher
Elsevier BV
Online
2012-03-17
DOI
10.1016/j.cap.2012.03.013

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