SiOx interlayer to enhance the performance of InGaZnO-TFT with AlOx gate insulator

标题
SiOx interlayer to enhance the performance of InGaZnO-TFT with AlOx gate insulator
作者
关键词
-
出版物
CURRENT APPLIED PHYSICS
Volume 12, Issue 5, Pages 1288-1291
出版商
Elsevier BV
发表日期
2012-03-17
DOI
10.1016/j.cap.2012.03.013

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