Synthesis of anti-reflective and hydrophobic Si nanorod arrays by colloidal lithography and reactive ion etching

Title
Synthesis of anti-reflective and hydrophobic Si nanorod arrays by colloidal lithography and reactive ion etching
Authors
Keywords
-
Journal
CRYSTENGCOMM
Volume 13, Issue 3, Pages 1014-1017
Publisher
Royal Society of Chemistry (RSC)
Online
2010-10-28
DOI
10.1039/c0ce00168f

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