Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings

Title
Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 11, Pages 114310
Publisher
AIP Publishing
Online
2009-12-05
DOI
10.1063/1.3267147

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