Reactive Sputtering Deposition of Perovskite Oxide and Oxynitride Lanthanum Titanium Films: Structural and Dielectric Characterization

Published 2013 View Full Article

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Title
Reactive Sputtering Deposition of Perovskite Oxide and Oxynitride Lanthanum Titanium Films: Structural and Dielectric Characterization
Authors
Keywords
-
Journal
CRYSTAL GROWTH & DESIGN
Volume 13, Issue 11, Pages 4852-4858
Publisher
American Chemical Society (ACS)
Online
2013-10-17
DOI
10.1021/cg4010196

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