Interpretation of Ion Velocity Distributions Measured with a Grounded Retarding Field Energy Analyzer (RFEA) in an Inductively Coupled Helicon Plasma

Title
Interpretation of Ion Velocity Distributions Measured with a Grounded Retarding Field Energy Analyzer (RFEA) in an Inductively Coupled Helicon Plasma
Authors
Keywords
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Journal
CONTRIBUTIONS TO PLASMA PHYSICS
Volume 53, Issue 1, Pages 27-32
Publisher
Wiley
Online
2013-01-10
DOI
10.1002/ctpp.201310005

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