Interpretation of Ion Velocity Distributions Measured with a Grounded Retarding Field Energy Analyzer (RFEA) in an Inductively Coupled Helicon Plasma

出版年份 2013 全文链接

标题

作者

关键词

出版物

Volume 53, Issue 1, Pages 27-32

出版商

Wiley

发表日期

2013-01-10

DOI

10.1002/ctpp.201310005

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