Out-of-plane electret-based MEMS energy harvester with the combined nonlinear effect from electrostatic force and a mechanical elastic stopper

Published 2015 View Full Article

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Title
Out-of-plane electret-based MEMS energy harvester with the combined nonlinear effect from electrostatic force and a mechanical elastic stopper
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 25, Issue 10, Pages 104014
Publisher
IOP Publishing
Online
2015-09-25
DOI
10.1088/0960-1317/25/10/104014

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