Out-of-plane electret-based MEMS energy harvester with the combined nonlinear effect from electrostatic force and a mechanical elastic stopper

出版年份 2015 全文链接

标题

作者

关键词

出版物

Volume 25, Issue 10, Pages 104014

出版商

IOP Publishing

发表日期

2015-09-25

DOI

10.1088/0960-1317/25/10/104014

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