Design and fabrication of an electrohydrodynamically actuated microlens with areal density modulated electrodes

Published 2015 View Full Article

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Title
Design and fabrication of an electrohydrodynamically actuated microlens with areal density modulated electrodes
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 26, Issue 1, Pages 015004
Publisher
IOP Publishing
Online
2015-11-30
DOI
10.1088/0960-1317/26/1/015004

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