Design and fabrication of an electrohydrodynamically actuated microlens with areal density modulated electrodes

标题
Design and fabrication of an electrohydrodynamically actuated microlens with areal density modulated electrodes
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 26, Issue 1, Pages 015004
出版商
IOP Publishing
发表日期
2015-11-30
DOI
10.1088/0960-1317/26/1/015004

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