Proportional Control Valves Integrated in Silicon Nitride Surface Channel Technology

Published 2015 View Full Article

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Title
Proportional Control Valves Integrated in Silicon Nitride Surface Channel Technology
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 6, Pages 1759-1767
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2015-07-22
DOI
10.1109/jmems.2015.2436402

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