期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 24, 期 6, 页码 1759-1767出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2015.2436402
关键词
Microvalve; surface channel technology; MEMS; proportional control; microfluidic
类别
资金
- European Community [282948]
- Point-One Phase2 Innovation Program through the Dutch Ministry of Economic Affairs [PNE101004]
- NanoNextNL, a micro and nanotechnology consortium of the Government of the Netherlands
We have designed and realized two types of proportional microcontrol valves in a silicon nitride surface channel technology process. This enables on-die integration of flow controllers with other surface channel devices, such as pressure sensors or thermal or Coriolis-based (mass) flow sensors, to obtain a proportional gas flow control system on a single chip. One valve design is implemented with inlet and outlet channels in the plane of the chip, which allows on-chip flow control between several fluidic components and allows up to 70 mg h(-1) of flow at 200 mbar. The other valve design operates out-of-plane between surface channels and a fluidic inlet, offering a flow range up to 1250 mg h(-1) at 600 mbar, smaller footprint, and low-leakage closure. Measured flow behavior agrees well with laminar flow models created for both valve types. [2015-0060]
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