Influence of pulsed Nd3+ : YAG laser beam profile and wavelength on microscribing of copper and aluminum thin films

Published 2015 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Influence of pulsed Nd3+ : YAG laser beam profile and wavelength on microscribing of copper and aluminum thin films
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 14, Issue 4, Pages 044503
Publisher
SPIE-Intl Soc Optical Eng
Online
2015-10-24
DOI
10.1117/1.jmm.14.4.044503

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Search

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.