Journal
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS
Volume 14, Issue 2, Pages -Publisher
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.JMM.14.2.025501
Keywords
microelectromechanical systems; nanophotonics; optical devices; optical fabrication; optomechanical design; plasmonics tunable filter; tunable filter
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Nanoelectromechanical systems (NEMS) design for active resonance frequency tuning of plasmonics optical filter is proposed and discussed. The design is based on controlling the relative position between two stubs in a metal-insulator-metal plasmonics waveguide using NEMS technology. The analysis of the optical design as well as the mechanical design is performed. Finally, a reasonable fabrication process of the device is proposed. For the suggested mechanical design parameters, the optical resonance wavelength can be tuned from 1.45 to 1.65 mu m using 7V(DC) actuation voltage. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
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