Control of polystyrene-block-poly(methyl methacrylate) directed self-assembly by laser-induced millisecond thermal annealing

Title
Control of polystyrene-block-poly(methyl methacrylate) directed self-assembly by laser-induced millisecond thermal annealing
Authors
Keywords
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Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 14, Issue 3, Pages 031205
Publisher
SPIE-Intl Soc Optical Eng
Online
2015-07-08
DOI
10.1117/1.jmm.14.3.031205

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