Preparation and characterization of Sn-doped β-Ga2O3 homoepitaxial films by MOCVD

Published 2015 View Full Article

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Title
Preparation and characterization of Sn-doped β-Ga2O3 homoepitaxial films by MOCVD
Authors
Keywords
Ga2O3, Hall Mobility, Metal Organic Chemical Vapor Deposition, Gallium Oxide, Film Resistivity
Journal
JOURNAL OF MATERIALS SCIENCE
Volume 50, Issue 8, Pages 3252-3257
Publisher
Springer Nature
Online
2015-02-11
DOI
10.1007/s10853-015-8893-4
References
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