Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides
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Title
Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides
Authors
Keywords
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Journal
JOURNAL OF MATERIALS RESEARCH
Volume 30, Issue 19, Pages 2928-2933
Publisher
Cambridge University Press (CUP)
Online
2015-07-22
DOI
10.1557/jmr.2015.140
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