Article
Optics
Yan-Cheng Liang, Yi-En Li, Yi-Hsien Liu, Jia-Fan Kuo, Chung-Wei Cheng, An-Chen Lee
Summary: The laser-induced periodic surface structure (LIPSS) can be induced on the 4H-SiC by femtosecond laser, but there are some problems during the laser process, such as debris dropped on the sample surface. In this study, high-spatial-frequency LIPSS (HSFL) were generated on the 4H-SiC surface using femtosecond laser. Raman spectrum was used to measure HSFL and chemical etching removed the oxidation layer. The results showed a strong correlation between the Raman intensity of amorphous SiC (a-SiC) and the etching rate of HSFL. Additionally, high-quality periodic structures were generated on 4H-SiC after the chemical etching process, with two different morphology observed by transmission electron microscope (TEM).
OPTICS AND LASER TECHNOLOGY
(2023)
Article
Materials Science, Ceramics
Lukang Wang, You Zhao, Zixuan Yang, Yulong Zhao, Xinwan Yang, Taobo Gong, Cun Li
Summary: Utilizing a Yb:KGW femtosecond laser to fabricate 4H-SiC sensor membranes has shown potential in achieving high size accuracy and steep sidewalls, with wet cleaning and ICP etching playing a significant role in improving membrane surface morphology. Energy-Dispersive X-ray Spectroscopy and Raman spectrum analysis confirmed that the crystal properties of the membrane bottom and thin epitaxial layers on the front side were not damaged by the micromachining process.
CERAMICS INTERNATIONAL
(2021)
Article
Chemistry, Physical
Qinghui Chen, Chuanqi Zhang, Yukui Cai, Xichun Luo, Bing Wang, Qinghua Song, Zhanqiang Liu
Summary: This paper proposes a nanosecond pulse laser ablation-chemical etching (LACE) process to prepare a patterned superhydrophobic surface on 316L stainless steel, which has controllable microstructures in terms of direction, period, and height. The experimental results indicate that the laser scanning speed is a prerequisite for the formation of microstructures, and the average laser power and scanning interval are important factors affecting the period and height of microstructures. The superhydrophobic surface achieves a rebound coefficient of 82.85% for water droplets with a contact angle of 154.7 degrees (+/- 0.6 degrees), demonstrating exceptional water repellency. Drag reduction tests show that it effectively reduces flow resistance in microchannels, with a maximum drag reduction rate of 29.83%. This work demonstrates the reliable application of the LACE process in drag reduction and water repellency, utilizing superhydrophobic surfaces with controllable microstructures and structural parameters.
APPLIED SURFACE SCIENCE
(2023)
Article
Materials Science, Ceramics
Lukang Wang, You Zhao, Yu Yang, Yulong Zhao
Summary: This paper presents a two-step laser etching method for bulk micromachining of 4H-SiC membranes. The first step involves rapid material removal, while the second step aims to improve surface morphology. By controlling variables such as laser fluence and scanning parameters, the researchers achieved a better surface morphology with the two-step laser etching method. The processing time was significantly reduced compared to one-step etching, and the membrane's roughness had a direct impact on the sensitivity of the SiC pressure sensor.
CERAMICS INTERNATIONAL
(2022)
Article
Chemistry, Multidisciplinary
Shunda Zhan, Bowen Liu, Xuemeng Yu, Xihan Chen, Guosong Zeng, Yonghua Zhao
Summary: This study presents an efficient method for fabricating nano-structured SiC using electrolytic plasma-assisted chemical etching (EPACE) without aggressive fluorine-containing reactants. The EPACE method allows for the formation of a uniform nanoporous layer on SiC wafers in a KOH aqueous solution, with adjustable pore diameters. The EPACE process involves electrolytic plasma-assisted oxidation and thermochemical reduction of an oxide. The approach demonstrates high etching efficiency and has the potential for time-saving and sustainable nanofabrication in industrial applications.
Article
Materials Science, Ceramics
Xi Wang, Klaus Zimmer, Martin Ehrhardt, Fengyun Zhang, Jin Wang, Pingping Wang, Jing Shao, Jixin Liu, Aixia Cao, Weili Sun, Shufeng Sun
Summary: This paper investigates the method and mechanism of high-temperature chemical-assisted laser etching of SiC/SiC composites and compares it with traditional laser processing methods. The results demonstrate that high-temperature chemical-assisted laser etching has some advantages in processing SiC/SiC composites.
CERAMICS INTERNATIONAL
(2022)
Article
Materials Science, Ceramics
Xi Wang, Bing Han, Martin Ehrhardt, Fengyun Zhang, Jin Wang, Pingping Wang, Peter Pavol Monka, Shufeng Sun
Summary: SiC is considered a preferred material for micro-electromechanical systems in the future. The difficulty in performing deep etching on SiC due to its excellent mechanical properties and chemical stability is investigated. The hybrid laser-high temperature chemical etching method is found to be effective in achieving non-damage deep etching, and the optimal laser parameters are identified.
INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY
(2022)
Article
Materials Science, Multidisciplinary
Kaiwen Ding, Cong Wang, Jian Duan
Summary: In this paper, wet chemical etching is used to improve the surface quality and size of femtosecond laser fabricated microstructures on zinc sulfide (ZnS). Nitric acid solution is chosen as the etchant. The study investigates the changes in surface morphology and size evolution of microgrooves with different etching conditions. The results provide an explanation for the effects of etching on surface quality and size.
Article
Materials Science, Ceramics
Jiayong Wei, Songmei Yuan, Jiaqi Zhang, Ning Zhou, Wei Zhang, Jiebo Li, Wenzhao An, Mengxuan Gao, Yanzhe Fu
Summary: This paper explores a novel method for underwater femtosecond laser ablation of SiC/SiC composites to obtain high cleanliness, low-oxidation microporous surfaces. The changes in hole depth, material removal rate (MRR), surface morphology, and material components during underwater femtosecond laser ablation are systematically analyzed, and the formation of typical features such as induced cones, small banded pits, fiber debonding and shedding is explained.
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
(2022)
Article
Engineering, Chemical
Yu Wang, Bo Xia, Shuai Han, Chunyang Li, Lulu Wan
Summary: Despite the high brittleness of ultra-white glass, surface modification through techniques like vacuum coating and femtosecond laser-assisted chemical etching can induce modified zones on its surface, making the material more suitable for microstructure processing. The experimental optimization of laser and chemical parameters further enhances the efficiency of controlling surface modifications.
Article
Optics
Sikun Zhou, Li Shen, Fangjie Wang, Yue Li, Hong Zhang, Shutong Wang, Shouhuan Zhou
Summary: This study demonstrated a successful approach for fabricating high-aspect-ratio microstructures in ZnSe using Bessel beam inscription and etching, opening up possibilities for expanding photonic crystal structures in the mid-to-far infrared field. The process allows for the production of three-dimensional microstructures inside polycrystalline ZnSe, showcasing its potential for various applications.
OPTICS AND LASER TECHNOLOGY
(2022)
Article
Chemistry, Physical
Yuhua Huang, Yuqi Zhou, Jinming Li, Fulong Zhu
Summary: Femtosecond laser surface modification improves the machinability of SiC, but caution should be taken for the heat effect and subsurface void generation.
APPLIED SURFACE SCIENCE
(2023)
Article
Materials Science, Multidisciplinary
Jiayong Wei, Songmei Yuan, Jiaqi Zhang, Ning Zhou, Wei Zhang, Jiebo Li, Wenzhao An, Mengxuan Gao, Yanzhe Fu
Summary: This study investigated the ablation behavior and mechanisms of SiC/SiC composites in different environments, demonstrating thermochemical corrosion dominance in air and a combination of thermomechanical denudation and thermochemical corrosion in water.
Article
Engineering, Mechanical
Qixiang Zhang, Jisheng Pan, Xiaowei Zhang, Jiabin Lu, Qiusheng Yan
Summary: This study evaluated the effect of different polishing slurries on single crystal 6H-SiC friction and wear, showing that the SiC surface only had scratches when silica sol abrasive was present, and a loose and porous chemical reaction layer formed when oxidant was present.
Article
Engineering, Electrical & Electronic
Xue-Qing Liu, Rong Cheng, Jia-Xin Zheng, Shuang-Ning Yang, Bao-Xu Wang, BenFeng Bai, Qi-Dai Chen, Hong-Bo Sun
Summary: Blazed gratings can concentrate light energy to desired diffraction orders in optical detection devices. By utilizing femtosecond laser lithography and reactive ion etching on sapphire substrates, blazed gratings with high mechanical stability were fabricated, providing insights for the construction of micro-optical devices with potential applications under harsh conditions.
JOURNAL OF LIGHTWAVE TECHNOLOGY
(2021)
