Optimization of the plasma oxidation and abrasive polishing processes in plasma-assisted polishing for highly effective planarization of 4H-SiC

Published 2014 View Full Article

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Title
Optimization of the plasma oxidation and abrasive polishing processes in plasma-assisted polishing for highly effective planarization of 4H-SiC
Authors
Keywords
-
Journal
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 63, Issue 1, Pages 529-532
Publisher
Elsevier BV
Online
2014-04-14
DOI
10.1016/j.cirp.2014.03.043

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