Chemical and mechanical balance in polishing of electronic materials for defect-free surfaces

Published 2009 View Full Article

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Title
Chemical and mechanical balance in polishing of electronic materials for defect-free surfaces
Authors
Keywords
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Journal
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 58, Issue 1, Pages 485-490
Publisher
Elsevier BV
Online
2009-04-23
DOI
10.1016/j.cirp.2009.03.115

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