Article
Engineering, Electrical & Electronic
Hengyu Wang, Ce Wang, Baozhu Wang, Hu Long, Kuang Sheng
Summary: The termination design for 4H-SiC super-junction devices based on trench-etching and implantation technology was discussed through 3D numeric simulations and experiments. It was found that the existing SJTE structure concept is no longer effective in blocking high voltage, leading to the proposal of a novel WT-SJTE structure which significantly improves the device breakdown voltage. Through narrow termination mesa design, both simulation and experimental results showed noticeable improvement, demonstrating the effectiveness of the WT-SJTE structure.
IEEE ELECTRON DEVICE LETTERS
(2021)
Article
Engineering, Electrical & Electronic
Baozhu Wang, Hengyu Wang, Ce Wang, Na Ren, Qing Guo, Kuang Sheng
Summary: This study presents the design and fabrication of a SiC super-junction Schottky barrier diode and introduces a new termination structure that successfully increases the breakdown voltage of the device. Experimental results demonstrate that optimizing device structural parameters can significantly reduce electric field crowding and improve device performance.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2021)
Article
Materials Science, Multidisciplinary
Kihyun Kim, Yehwan Kang, Seungbok Yun, Changheon Yang, Eunsik Jung, Jeongsoo Hong, Kyunghwan Kim
Summary: In this study, the characteristics of an n-type Ni/SiC ohmic contact on thin SiC wafers were investigated using laser annealing process. The electrical behavior of ohmic contacts was tested in 4H-SiC JBS diode devices. The results showed that a decrease in on-resistance was achieved by using the laser annealing process with Ni silicide.
Article
Chemistry, Analytical
Ruoyu Wang, Jingwei Guo, Chang Liu, Hao Wu, Zhiyong Huang, Shengdong Hu
Summary: In this paper, a new 650V 4H-SiC trench MOSFET with HJD and double CSLs is proposed and studied, which can suppress the turn-on of parasitic body diode, improve the transistor performance, and reduce the on-state resistance and gate-drain capacitance by using CSLs with different doping concentrations.
Article
Engineering, Electrical & Electronic
Baozhu Wang, Hengyu Wang, Ce Wang, Haoyuan Cheng, Na Ren, Qing Guo, Kuang Sheng
Summary: This paper investigates the impact of trench angle on SiC super-junction device performance, finding that the highest figure of merit is achieved at a 90-degree trench angle with optimal epi doping. However, achieving a 90-degree trench angle is challenging with current fabrication technology. The proposed multi-epi structure demonstrates significant performance improvements for devices with non-90-degree trenches, showing superiority in BFOM compared to conventional designs.
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
(2021)
Article
Physics, Multidisciplinary
Ying Zhu, Wang Lin, Dong-Shuai Li, Liu-An Li, Xian-Yi Lv, Qi-Liang Wang, Guang-Tian Zou
Summary: The study presents a trench diamond junction barrier Schottky (JBS) diode with a sidewall enhanced structure, which introduces Schottky contact areas on the sidewall of the trench. This design weakens the junction field-effect transistor effect and enhances the reverse breakdown voltage, resulting in low on-resistance and high Baliga's figure of merit (FOM) value. With optimal parameters, a high Baliga's FOM value of 2.28 GW/cm(2) is achieved. This sidewall-enhanced trench JBS diode shows promising potential for applications in diamond power electronics.
Article
Chemistry, Physical
Xiaoxue Yan, Lin Liang, Xinyuan Huang, Heqing Zhong, Zewei Yang
Summary: In this study, the super junction (SJ) structure is introduced in the silicon carbide drift step recovery diode (DSRD) for the first time, leading to enhanced recovery hardness and blocking capability. The SJ SiC DSRD exhibits 28% higher breakdown voltage and 31% higher dv/dt output compared to conventional SiC DSRD.
Article
Engineering, Electrical & Electronic
Moufu Kong, Zongqi Chen, Jiacheng Gao, Yuanmiao Duan, Zewei Hu, Bo Yi, Hongqiang Yang
Summary: A new high-performance diode, called sidewall enhanced trench junction barrier Schottky (SET-JBS) diode, is proposed in this article. By introducing Schottky contacts on the sidewall of the trenches, the diode achieves a larger contact area and weakens the junction field-effect transistor effect, resulting in high forward current density and low specific on-resistance. Simulation results show that the proposed SET-JBS diode outperforms the conventional trench JBS (T-JBS) diode and trench MOS barrier Schottky (TMBS) diode in terms of on-resistance and leakage current. The diode also exhibits better figure of merit and trade-off relationship between on-resistance and breakdown voltage compared to the conventional T-JBS and TMBS diodes. The forward I-V analytical model of the SET-JBS diode is also proposed and validated with simulation results. Promising potential of the proposed SET-JBS diode in power electronics applications is indicated by all the simulation results.
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
(2022)
Article
Engineering, Electrical & Electronic
G. W. C. Baker, C. Chan, A. B. Renz, Y. Qi, T. Dai, F. Li, V. A. Shah, P. A. Mawby, M. Antoniou, P. M. Gammon
Summary: A class of vertical 1700-V 4H-SiC SJ Schottky diodes were simulated and optimized to achieve results below the unipolar limit, with practical and cost-effective realization. By introducing an angled trench sidewall and additional doping regions, the device performance was improved and the production success rate was increased. The balance between specific ON-resistance and implantation window can be adjusted by tuning the doping level of the additional regions, providing flexibility for performance optimization.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2021)
Article
Chemistry, Analytical
Katarzyna Drozdowska, Adil Rehman, Janusz Smulko, Sergey Rumyantsev, Bartlomiej Stonio, Aleksandra Krajewska, Mateusz Slowikowski, Maciej Filipiak, Pavlo Sai, Grzegorz Cywinski
Summary: The effect of ultraviolet or blue irradiation on graphene/n-doped silicon Schottky junctions for gas sensing was investigated. The response of Schottky diodes to nitrogen dioxide and tetrahydrofuran was observed on the current-voltage characteristics, with different impacts on the forward and reverse regions. The detection limits for NO2 and THF were lowered by the influence of the organic molecules. The width of the junction area is crucial for optimizing graphene-silicon Schottky-based sensors.
SENSORS AND ACTUATORS B-CHEMICAL
(2023)
Article
Computer Science, Information Systems
Liansheng Zhao, Yidan Tang, Yun Bai, Menglin Qiu, Zhikang Wu, Yu Yang, Chengyue Yang, Xiaoli Tian, Xinyu Liu
Summary: This study investigated the defects and electrical characteristics of 4H-SiC JBS diodes irradiated by 2 MeV protons at temperatures ranging from 100 to 400 K. It was found that as the irradiation temperature increased, the on-resistance decreased, leakage current increased, and DLTS spectrum intensity decreased.
Article
Engineering, Electrical & Electronic
Ala K. Jehad, Mehmet Fidan, Ozhan Unverdi, Cem Celebi
Summary: A self-powered, high-performance graphene/Silicon Carbide ultraviolet photodetector was fabricated, and the effect of using monolayer and bilayer graphene on device performance parameters was investigated. The photodetector exhibited high spectral responsivity, maximum detectivity, and minimum noise equivalent power. Bilayer graphene showed no significant change in spectral responsivity but improved the response speed compared to monolayer graphene.
SENSORS AND ACTUATORS A-PHYSICAL
(2023)
Article
Computer Science, Information Systems
Zhikang Wu, Yun Bai, Chengyue Yang, Chengzhan Li, Jilong Hao, Xiaoli Tian, Antao Wang, Yidan Tang, Jiang Lu, Xinyu Liu
Summary: The heavy ion radiation response and degradation of SiC junction barrier Schottky (JBS) diodes with different P+ implantation intervals were investigated. It was found that the larger the implantation interval, the faster the increase of reverse leakage current and the more severe the degradation. TCAD simulation revealed that the electric field at sensitive points directly influenced the degradation rate. The introduction of transient energy by heavy ion impact resulted in local temperature increase, lattice damage, and defects introduction.
Article
Metallurgy & Metallurgical Engineering
Yang Shuai, Zhang Xiao-dong, Cao An, Luo Wen-yu, Zhang Guang-lei, Peng Bo, Zhao Jin-jin
Summary: The novel UHV 3D-PBL MPS has outstanding device performance, with the ability to transfer the peak electric field deeper into the epitaxial layer in the reverse blocking state, enhancing the device's ability to shield high electric fields and maintaining forward conduction characteristics.
JOURNAL OF CENTRAL SOUTH UNIVERSITY
(2021)
Article
Engineering, Electrical & Electronic
Yuan Li, Alex Q. Huang
Summary: The Huang-Pair is a novel hybrid diode concept that integrates a low forward voltage drop diode with a high voltage majority carrier switch, demonstrating flexibility in performance tradeoffs and applicability across different voltage classes.
IEEE TRANSACTIONS ON POWER ELECTRONICS
(2021)
Article
Engineering, Electrical & Electronic
Xueqian Zhong, Baozhu Wang, Jue Wang, Kuang Sheng
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2018)
Correction
Engineering, Electrical & Electronic
Hengyu Wang, Jue Wang, Li Liu, Yucen Li, Baozhu Wang, Hongyi Xu, Shu Yang, Kuang Sheng
IEEE ELECTRON DEVICE LETTERS
(2019)
Article
Engineering, Electrical & Electronic
Hengyu Wang, Ce Wang, Baozhu Wang, Na Ren, Kuang Sheng
IEEE ELECTRON DEVICE LETTERS
(2020)
Article
Engineering, Electrical & Electronic
Hengyu Wang, Ce Wang, Baozhu Wang, Hu Long, Kuang Sheng
Summary: The termination design for 4H-SiC super-junction devices based on trench-etching and implantation technology was discussed through 3D numeric simulations and experiments. It was found that the existing SJTE structure concept is no longer effective in blocking high voltage, leading to the proposal of a novel WT-SJTE structure which significantly improves the device breakdown voltage. Through narrow termination mesa design, both simulation and experimental results showed noticeable improvement, demonstrating the effectiveness of the WT-SJTE structure.
IEEE ELECTRON DEVICE LETTERS
(2021)
Article
Engineering, Electrical & Electronic
Baozhu Wang, Hengyu Wang, Ce Wang, Haoyuan Cheng, Na Ren, Qing Guo, Kuang Sheng
Summary: This paper investigates the impact of trench angle on SiC super-junction device performance, finding that the highest figure of merit is achieved at a 90-degree trench angle with optimal epi doping. However, achieving a 90-degree trench angle is challenging with current fabrication technology. The proposed multi-epi structure demonstrates significant performance improvements for devices with non-90-degree trenches, showing superiority in BFOM compared to conventional designs.
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
(2021)
Article
Engineering, Electrical & Electronic
Baozhu Wang, Hengyu Wang, Ce Wang, Na Ren, Qing Guo, Kuang Sheng
Summary: This study presents the design and fabrication of a SiC super-junction Schottky barrier diode and introduces a new termination structure that successfully increases the breakdown voltage of the device. Experimental results demonstrate that optimizing device structural parameters can significantly reduce electric field crowding and improve device performance.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2021)
Article
Engineering, Electrical & Electronic
Ce Wang, Hengyu Wang, Baozhu Wang, Haoyuan Cheng, Kuang Sheng
Summary: This article presents a characterization of SiC super junction JFETs fabricated by sidewall implantation with different mesa widths and termination designs. The study focuses on the breakdown voltage, on-resistance, and performance in different operating modes. The research provides insights into optimizing the device design and improving its performance in various applications.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2022)
Proceedings Paper
Computer Science, Theory & Methods
Xueqian Zhong, Baozhu Wang, Kuang Sheng
2016 28TH INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES AND ICS (ISPSD)
(2016)