Molecular Mechanisms of Aluminum Oxide Thin Film Growth on Polystyrene during Atomic Layer Deposition

标题
Molecular Mechanisms of Aluminum Oxide Thin Film Growth on Polystyrene during Atomic Layer Deposition
作者
关键词
-
出版物
CHEMISTRY-A EUROPEAN JOURNAL
Volume 16, Issue 47, Pages 13925-13929
出版商
Wiley
发表日期
2010-11-12
DOI
10.1002/chem.201001888

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