Controlling the Structural and Optical Properties of Ta3N5 Films through Nitridation Temperature and the Nature of the Ta Metal

Title
Controlling the Structural and Optical Properties of Ta3N5 Films through Nitridation Temperature and the Nature of the Ta Metal
Authors
Keywords
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Journal
CHEMISTRY OF MATERIALS
Volume 26, Issue 4, Pages 1576-1582
Publisher
American Chemical Society (ACS)
Online
2014-02-05
DOI
10.1021/cm403482s

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