Controlling the Structural and Optical Properties of Ta3N5 Films through Nitridation Temperature and the Nature of the Ta Metal

标题
Controlling the Structural and Optical Properties of Ta3N5 Films through Nitridation Temperature and the Nature of the Ta Metal
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 26, Issue 4, Pages 1576-1582
出版商
American Chemical Society (ACS)
发表日期
2014-02-05
DOI
10.1021/cm403482s

向作者/读者发起求助以获取更多资源

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started