Atomic Layer Deposition of Li2O–Al2O3Thin Films

标题
Atomic Layer Deposition of Li2O–Al2O3Thin Films
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 23, Issue 21, Pages 4669-4675
出版商
American Chemical Society (ACS)
发表日期
2011-10-05
DOI
10.1021/cm200899k

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