Atomic Layer Deposition of Antimony and its Compounds Using Dechlorosilylation Reactions of Tris(triethylsilyl)antimony

Published 2010 View Full Article

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Title
Atomic Layer Deposition of Antimony and its Compounds Using Dechlorosilylation Reactions of Tris(triethylsilyl)antimony
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 23, Issue 2, Pages 247-254
Publisher
American Chemical Society (ACS)
Online
2010-12-17
DOI
10.1021/cm102904f

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