Direct-Liquid-Injection Chemical Vapor Deposition of Nickel Nitride Films and Their Reduction to Nickel Films

Published 2010 View Full Article

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Title
Direct-Liquid-Injection Chemical Vapor Deposition of Nickel Nitride Films and Their Reduction to Nickel Films
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 22, Issue 10, Pages 3060-3066
Publisher
American Chemical Society (ACS)
Online
2010-04-28
DOI
10.1021/cm903636j

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