Direct-Liquid-Injection Chemical Vapor Deposition of Nickel Nitride Films and Their Reduction to Nickel Films

标题
Direct-Liquid-Injection Chemical Vapor Deposition of Nickel Nitride Films and Their Reduction to Nickel Films
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 22, Issue 10, Pages 3060-3066
出版商
American Chemical Society (ACS)
发表日期
2010-04-28
DOI
10.1021/cm903636j

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