Atomic Layer Deposition of Lanthanum Stabilized Amorphous Hafnium Oxide Thin Films

标题
Atomic Layer Deposition of Lanthanum Stabilized Amorphous Hafnium Oxide Thin Films
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 21, Issue 14, Pages 3096-3101
出版商
American Chemical Society (ACS)
发表日期
2009-07-02
DOI
10.1021/cm9001064

向作者/读者发起求助以获取更多资源

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now