Deposition of Thin Copper Layers using Copper(II) Carboxylate Complexes withtert-Butylamine as New CVD Precursors

Published 2013 View Full Article

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Title
Deposition of Thin Copper Layers using Copper(II) Carboxylate Complexes withtert-Butylamine as New CVD Precursors
Authors
Keywords
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Journal
CHEMICAL VAPOR DEPOSITION
Volume 19, Issue 7-8-9, Pages 251-259
Publisher
Wiley
Online
2013-08-07
DOI
10.1002/cvde.201207049
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