Chloride-Based CVD Growth of Silicon Carbide for Electronic Applications

Published 2011 View Full Article

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Title
Chloride-Based CVD Growth of Silicon Carbide for Electronic Applications
Authors
Keywords
-
Journal
CHEMICAL REVIEWS
Volume 112, Issue 4, Pages 2434-2453
Publisher
American Chemical Society (ACS)
Online
2011-12-03
DOI
10.1021/cr200257z

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