Chloride-Based CVD Growth of Silicon Carbide for Electronic Applications

标题
Chloride-Based CVD Growth of Silicon Carbide for Electronic Applications
作者
关键词
-
出版物
CHEMICAL REVIEWS
Volume 112, Issue 4, Pages 2434-2453
出版商
American Chemical Society (ACS)
发表日期
2011-12-03
DOI
10.1021/cr200257z

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